64-21127D 03-21127/M 02-15467/CQ ASM plc module
| Brand/Manufacturer | ASM/Netherlands |
| Part Number | 64-21127D 03-21127/M 02-15467/CQ |
| Alternate Part Number | 64-21127D 03-21127/M 02-15467/CQ |
| Description | plc module |
| Dimennsions | 18.4cm x 12.3cm x 4.6cm |
| Weight | 0.23kg |
Product Details
Features:
True vapor mass flow in bubbler systems.
Defeats influence of liquid level, temperature and pressure.
Liquid level surveillance possible.
Mounting position insensitive.
Good surface finish for ultra clean operation.
Various gas fitting configurations.
Heating temperature of bubbler much lower compared with direct vaporization.
Thermal control valve design gives : reliability,a normally open flow path for gas line
purging when power is off
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