64-21140C 03-21140-06/F 02-33632-06/C ASM Board plc module
| Brand/Manufacturer | ASM/Netherlands |
| Part Number | 64-21140C 03-21140-06/F 02-33632-06/C |
| Alternate Part Number | 64-21140C 03-21140-06/F 02-33632-06/C |
| Description | ASM Board |
| Dimennsions | 18.8cm x 12.1cm x 4.6cm |
| Weight | 0.26kg |
Product Details
Source materials include SiCl4, SiHCl3, POCl13, GeCl4 and BBr3. Other doping material can
also be controlled, provided that they vaporize with adequate concentration for accurate
ratiodetection. Carrier gases include H2, He, N2, O2 and Ar.
Three outputs are provided : Source (0 to +5VDC); Carrier (0 to +5VDC); Ratio (0 to +5VDC).
These outputs can be monitored with any 5 volt D.C. voltmeter with a sensitivity of 1000
ohms/volt or more. A built-in valve varies the carrier mass flow rate to control the source
gram/min. selected by an external control voltage.
A single small package contains the flowmeter section, ratio detector, control valve and the
electronics.
COMMAND SETTING 0.1 to 5 vdc
OUTPUT INDICATION
1. SOURCE: 0.1-5 vdc linearly proportional to mass flow rate of vaporized liquid
2. CARRIER: 0.1-5 vdc linearly proportional to mass flow rate of carrier gas
3. RATIO: 0.1-5 vdc linearly proportional to ratio of vapor flow (SCCM) to carrier flow (SCCM) scaled with 5 vdc = 50%
Note that when there is no bubbling (i.e. no control) Ratio=0 and Carrier will reach value greater than 5vdc (typically 5.6 volts).
OUTPUT IMPEDANCE: 10 ohms maximum
RIPPLE: 50 mv p-p maximum
Moore News
TO CONTACT YOUR ACCOUNT MANAGER QUICK QUOTE
Moore Automation has brought together a talented team of professionals with decades of experience in high-tech distribution, supply chain management, logistics, network technologies, and customer care.
Not only we sell the products, but also provide a complete set of pre-sale and post-sale value-added services that enable our customers to maintain low cost of technology ownership and achieve highest return on investment during full technology products life cycle. When a customer is sourcing products or solutions he expects fast and competitive price offer, guaranteed quality and delivery time, best warranty and financial terms. Our team has the knowledge and resources to fulfill this set of customer's wishes.
More Products
| GE | DS3800NPSE1E1G | HONEYWELL | 51403519-160 |
| GE | DS3810MMBB1A1A | HONEYWELL | 51202324-100 |
| GE | F31X134EPRBEG1 | HONEYWELL | 51202324-300 |
| GE | F31X134EPRBEG1 FR00/0 | HONEYWELL | 51202329-102 |
| GE | F31X134EPRBHG1 | HONEYWELL | 51202329-112 |
| AB | 1503VC-BMC4 | INDRAMAT | BTV06.1HN-RS-FW |
| AB | 1734-OB4E | INDRAMAT | CTA10.1B-000-FW |
| AB | 1771-PS7 | INDRAMAT | DKC01.3-040-7-FW |
| AB | 6181F-15TSXP | INDRAMAT | NAM 1.3-15 |
| AB | 1785-L20C15 | INDRAMAT | REFU RZB 01.2-UN |
| AB | 1771-WHFB | INDUSTRIAL | ATR-4D41133 MS-DOS |
Contact Us
miya@mvme.cn(Click)
Email: miya@mvme.cn
QQ: 2851195450
Tel: 86-18020776792
Skype: miyazheng52
Product Tags:
|
|
64-21140C 03-21140-06/F 02-33632-06/C ASM Board Plc Module Images
|
